SHARP: Advanced Extreme-Ultraviolet Microscopy for Developing Microchips

URL

http://www.imaging-git.com/news/sharp-advanced-extreme-ultraviolet-microscopy-developing-microchips

Description

Scientists at the U.S. Department of Energy's Lawrence Berkeley National Laboratory (Berkeley Lab) have partnered with colleagues at semiconductor manufacturers to create the world's most advanced extreme-ultraviolet (EUV) microscope. Called SHARP (a succinct acronym for a long name, the Semiconductor High-NA Actinic Reticle Review Project), the new microscope will be dedicated to photolithography, the central process in the creation of computer chips.